The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2008
Filed:
Jul. 21, 2004
Daniel E. Siegfried, Fort Collins, CO (US);
David Matthew Burtner, Fort Collins, CO (US);
Scott A. Townsend, Fort Collins, CO (US);
Valery Alexeyev, Moscow, RU;
Daniel E. Siegfried, Fort Collins, CO (US);
David Matthew Burtner, Fort Collins, CO (US);
Scott A. Townsend, Fort Collins, CO (US);
Valery Alexeyev, Moscow, RU;
Veeco Instruments, Inc., Woodbury, NY (US);
Abstract
A modular ion source design relies on relatively short modular core ALS components, which can be coupled together to form a longer ALS while maintaining an acceptable tolerance of the anode-cathode gap. Many of the modular components may be designed to have common characteristics so as to allow use of these components in ion sources of varying sizes. A flexible anode can adapt to inconsistencies in the ion source body and module joints to hold a uniform anode-cathode gap along the length of the ALS. A clamp configuration fixes the cooling tube to the ion source body, thereby avoiding heat-introduced warping to the source body during manufacturing.