The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2008
Filed:
Jul. 13, 2004
Charles E. Wickersham, Jr., Columbus, OH (US);
Zhiguo Zhang, Columbus, OH (US);
Larry Edwin Ellison, Wellston, OH (US);
Mikhail Y. Kachalov, Virginia Beach, VA (US);
John D. White, Iii, Columbus, OH (US);
Charles E. Wickersham, Jr., Columbus, OH (US);
Zhiguo Zhang, Columbus, OH (US);
Larry Edwin Ellison, Wellston, OH (US);
Mikhail Y. Kachalov, Virginia Beach, VA (US);
John D. White, III, Columbus, OH (US);
Cabot Corporation, Boston, MA (US);
Abstract
A method and apparatus for thermographically evaluating the bond integrity of a sputtering target assembly is described. The method includes applying a heating or cooling medium or energy to one surface of the assembly and acquiring a graphic recording of a corresponding temperature change on the opposing surface of the assembly using an imaging device. Also described is a method of mathematically analyzing the pixel data recorded in each frame to produce an integrated normalized temperature map that represents the bond integrity of the assembly.