The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2008
Filed:
Apr. 20, 2004
Kentaro Asakura, Nirasaki, JP;
Kentaro Asakura, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
An apparatus for performing a semiconductor process on a target substrate (W) includes a lifting mechanism () disposed in a worktable () to assist transfer of the target substrate. The lifting mechanism includes a lifter pin () configured to support and move up and down the target substrate, and a guide hole () configured to guide the lifter pin being moved up and down. The guide hole includes a main hole portion () which extends through the worktable from its upper surface to lower surface, and an extended hole portion () which extends into an extension sleeve () which projects downward from the lower surface of the worktable to correspond to the main hole portion.