The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2008
Filed:
Jan. 25, 2006
John Burns, Colorado Springs, CO (US);
Martin L. Forbes, Divide, CO (US);
Matthew A. Fuller, Colorado Springs, CO (US);
Jeffery J. King, Colorado Springs, CO (US);
Mark V. Smith, Colorado Springs, CO (US);
John Burns, Colorado Springs, CO (US);
Martin L. Forbes, Divide, CO (US);
Matthew A. Fuller, Colorado Springs, CO (US);
Jeffery J. King, Colorado Springs, CO (US);
Mark V. Smith, Colorado Springs, CO (US);
Entegris, Inc., Chaska, MN (US);
Abstract
A substrate kinematic coupling or guide plate for a substrate carrier having textured or patterned surfaces at the points of contact to reduce frictional forces generated between automated processing equipment and the kinematic coupling. The textured surface reduces the contact area between the processing equipment and the contact portion of the kinematic coupling, thereby reducing the resultant frictional force. By reducing the frictional force, the substrate carrier more readily settles on the mounting pins of the processing equipment, thus avoiding intolerable height and angular deviations during automated access to the substrates. Textures include, but are not limited to, a knurl pattern, ridges running laterally along the contact portions, and ridges running longitudinally along the contact portions. The textures may be formed by a blow molding, injection molding or in an overmolding process, or by a machining or imprinting process.