The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 26, 2008

Filed:

Mar. 31, 2005
Applicants:

Siegfried Schwarzl, Neubiberg, DE;

Stefan Wurm, Austin, TX (US);

Inventors:

Siegfried Schwarzl, Neubiberg, DE;

Stefan Wurm, Austin, TX (US);

Assignee:

Infineon Technologies AG, Neubiberg, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/00 (2006.01); G01J 5/46 (2006.01); G01N 21/55 (2006.01); H01L 31/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

Method for determining a mean radiation power of electromagnetic radiation of a radiation source, the radiation being intensity-modulated with modulation frequency ω, in a predetermined time interval. The method provides a reflector designed to reflect electromagnetic radiation of the radiation source and electromagnetic radiation of a test radiation source, irradiates a predetermined area of the reflector with the source electromagnetic radiation, at least partially irradiates the predetermined area of the reflector with electromagnetic radiation of the test radiation source, measures a ω-modulated power component P(t) of a reflected test radiation power P(t) of an electromagnetic radiation of the test radiation source, the radiation being reflected from the area, in the predetermined time interval, determines a mean value of the measured ω-modulated power component P(t) of the reflected test radiation power P(t) in the predetermined time interval, and determines the mean radiation power from the relationship where a is a predetermined constant.


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