The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2008
Filed:
Apr. 06, 2005
Shigetomi Michimata, Tokyo, JP;
Ryo Nagai, Tokyo, JP;
Satoru Yamada, Tokyo, JP;
Yoshitaka Nakamura, Tokyo, JP;
Ryoichi Nakamura, Tokyo, JP;
Shigetomi Michimata, Tokyo, JP;
Ryo Nagai, Tokyo, JP;
Satoru Yamada, Tokyo, JP;
Yoshitaka Nakamura, Tokyo, JP;
Ryoichi Nakamura, Tokyo, JP;
Elpida Memory, Inc., Tokyo, JP;
Abstract
A method includes the steps of: implanting boron into a surface region of a silicon substrate to form a pdiffused region; implanting indium into the surface of the pdiffused region, to form an indium-implanted layer; forming a contact metal layer on the indium-implanted layer; and reacting silicon in the silicon substrate including the indium-implanted layer with metal in the contact metal layer to form a titanium silicide layer.