The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2008
Filed:
Oct. 11, 2006
Applicants:
Koji Egashira, Tosu, JP;
Yuji Kamikawa, Tosu, JP;
Inventors:
Koji Egashira, Tosu, JP;
Yuji Kamikawa, Tosu, JP;
Assignee:
Tokyo Electron Limited, Tokyo-To, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
A liquid processing apparatus includes containerssurrounding processing chambersfor accommodating a plurality of wafers W and nozzlesfor supplying a processing liquid to the substrates W in order to perform a liquid process. The nozzlesare respectively equipped with a plurality of ejecting orificescapable of ejecting the processing liquid in a plane manner, allowing the substrates W to be processed uniformly and effectively.