The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2008
Filed:
Aug. 27, 2001
David Paul Agnello, Wappingers Falls, NY (US);
Mary Conroy Bushey, South Burlington, VT (US);
Donna K. Johnson, Underhill, VT (US);
Jerome Brett Lasky, Essex Junction, VT (US);
Peter James Lindgren, Burlington, VT (US);
Kirk David Peterson, Essex Junction, VT (US);
David Paul Agnello, Wappingers Falls, NY (US);
Mary Conroy Bushey, South Burlington, VT (US);
Donna K. Johnson, Underhill, VT (US);
Jerome Brett Lasky, Essex Junction, VT (US);
Peter James Lindgren, Burlington, VT (US);
Kirk David Peterson, Essex Junction, VT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A structure relating to removal of an oxide of titanium generated as a byproduct of a process that forms cobalt disilicide within an insulated-gate field effect transistor (FET). The structure may comprise a layer of cobalt disilicide that is substantially free of cobalt monosilicide, with substantially no stringer of an oxide of titanium on the layer of cobalt disilicide. The structure may alternatively comprise a layer of cobalt disilicide, a patch of an oxide of titanium, and a reagent in contact with the patch at a temperature and for a period of time. The layer is substantially free of cobalt monosilicide. The patch is on the layer of cobalt disilicide. The reagent is adapted to remove the patch within the period of time. The reagent does not chemically react with the layer of cobalt disilicide, and the reagent comprises water, ammonium hydroxide, and hydrogen peroxide.