The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2008
Filed:
Jun. 12, 2006
Hiroshi Makino, Kokubunji, JP;
Hisaya Murakoshi, Tokyo, JP;
Hiroyuki Shinada, Mitaka, JP;
Hideo Todokoro, Hinode, JP;
Hiroshi Makino, Kokubunji, JP;
Hisaya Murakoshi, Tokyo, JP;
Hiroyuki Shinada, Mitaka, JP;
Hideo Todokoro, Hinode, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
An inspection apparatus comprising an electron emitting unit for sequentially emitting an electron beam in the direction of an inspection area of a sample; a deceleration unit for drawing back the electron beam in the vicinity of the inspection area; an imaging unit for forming images of the drawing back electron beam on multiple different image forming conditions; an image detecting unit for capturing the electron beam that formed an image corresponding to each image forming condition; and an image processing unit for comparing the images on different image forming conditions with one another to detect a defect in the inspection area.