The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2008
Filed:
Sep. 15, 2005
Haico Victor Kok, Eindhoven, NL;
Koen Kivits, Helmond, NL;
Ron Van DE Laak, Eindhoven, NL;
Johannes Maria Kuiper, Koog aan de Zaan, NL;
Gerbrand Van Der Zouw, Eindhoven, NL;
Hoite Pieter Theodoor Tolsma, Eindhoven, NL;
Haico Victor Kok, Eindhoven, NL;
Koen Kivits, Helmond, NL;
Ron Van De Laak, Eindhoven, NL;
Johannes Maria Kuiper, Koog aan de Zaan, NL;
Gerbrand Van Der Zouw, Eindhoven, NL;
Hoite Pieter Theodoor Tolsma, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
The invention provides a method for determining vibration-related information by projecting an aerial image at an image position in a projection plane, mapping an intensity of the aerial image into an image map, the image map arranged for comprising values of coordinates of sampling locations and of the intensity sampled at each sampling location, and measuring intensity of the aerial image received through a slot pattern. The method further includes determining from the image map a detection position of a slope portion of the image map, at the detection position of the slope portion, measuring of a temporal intensity of the aerial image and measuring of relative positions of the slot pattern and the image position, the relative positions of the slot being measured as position-related data of the slot pattern and determining from the temporal intensity of the aerial image vibration-related information for said aerial image.