The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 2008
Filed:
Sep. 21, 2006
Wenbing Yun, Walnut Creek, CA (US);
Yuxin Wang, Arlington Heights, IL (US);
Michael Feser, Martinez, CA (US);
Frederick W. Duewer, Albany, CA (US);
Wenbing Yun, Walnut Creek, CA (US);
Yuxin Wang, Arlington Heights, IL (US);
Michael Feser, Martinez, CA (US);
Frederick W. Duewer, Albany, CA (US);
Xradia, Inc., Concord, CA (US);
Abstract
An x-ray microscope uses a microfocus x-ray source with a focus spot of less than 10 micrometers and a Wolter condenser having a magnification of about four or more for concentrating x-rays from the source onto a sample. A detector is provided for detecting the x-rays after interaction with the sample, and an x-ray objective is used to form an image of the sample on the detector. The use of the Wolter optic addresses a problem with microfocus sources that arise when the size of the focal spot that must then be imaged onto the sample with the condenser is smaller than the field of view.