The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 2008
Filed:
Jun. 12, 2007
Atsuko Yamaguchi, Kodaira, JP;
Hiroshi Fukuda, Tokyo, JP;
Osamu Komuro, Hitachinaka, JP;
Hiroki Kawada, Tsuchiura, JP;
Atsuko Yamaguchi, Kodaira, JP;
Hiroshi Fukuda, Tokyo, JP;
Osamu Komuro, Hitachinaka, JP;
Hiroki Kawada, Tsuchiura, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A quantity (or dispersion value) of a distribution of edge position due to random noise is expected to be reduced statistically to 1/N when N edge position data items are averaged. Using this property, the single page image is averaged in a vertical direction with various values of parameter S, and then the edge roughness index is calculated. The S-dependence of the edge roughness index is analyzed and a term of a dispersion value directly proportional to 1/S is determined as being due to noise.