The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 2008
Filed:
Nov. 03, 2005
Applicants:
Robert A. Smythe, Middletown, CT (US);
Donald S. Battistoni, Farmington, CT (US);
Inventors:
Robert A. Smythe, Middletown, CT (US);
Donald S. Battistoni, Farmington, CT (US);
Assignee:
Zygo Corporation, Middlefield, CT (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
Apparatus and methods for generating an empirically determined mathematical model of wavefront error in an interferometer as a function of aperture misalignment and then applying the model to correct subsequent measurements. The methods are useful in Fizeau and other types of interferometers in which carrier fringe analysis may be used for reducing errors caused by environmental and vibration effects.