The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2008
Filed:
Jun. 30, 2006
Henricus Petrus Maria Pellemans, Veldhoven, NL;
Arie Jeffrey Den Boef, Waalre, NL;
Wilhelmus Maria Corbeij, Eindhoven, NL;
Hans Van Der Laan, Veldhoven, NL;
Henricus Petrus Maria Pellemans, Veldhoven, NL;
Arie Jeffrey Den Boef, Waalre, NL;
Wilhelmus Maria Corbeij, Eindhoven, NL;
Hans Van Der Laan, Veldhoven, NL;
ASML Netherlands, Veldhoven, NL;
Abstract
A metrology apparatus for measuring a parameter of a microscopic structure on a substrate, the apparatus comprising a supercontinuum light source arranged to generate a measurement beam, an optical system arranged to direct the measurement beam onto the substrate and a sensor for detecting radiation reflected and/or diffracted by the structure.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile