The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2008
Filed:
Mar. 21, 2006
Xiafang (Michelle) Zhang, San Jose, CA (US);
Zhiwei (Steve) Xu, Sunnyvale, CA (US);
Jianou Shi, Milpitas, CA (US);
Quoc-bao VU, Milpitas, CA (US);
Thomas G. Miller, Sunnyvale, CA (US);
Gregory S. Horner, Santa Clara, CA (US);
Xiafang (Michelle) Zhang, San Jose, CA (US);
Zhiwei (Steve) Xu, Sunnyvale, CA (US);
Jianou Shi, Milpitas, CA (US);
Quoc-Bao Vu, Milpitas, CA (US);
Thomas G. Miller, Sunnyvale, CA (US);
Gregory S. Horner, Santa Clara, CA (US);
KLA-Tencor Technologies Corp., Milpitas, CA (US);
Abstract
Methods for determining an electrical parameter of an insulating film are provided. One method includes measuring a surface potential of a leaky insulating film without inducing leakage across the insulating film and determining the electrical parameter from the surface potential. Another method includes applying an electrical field across the insulating film. Leakage across the insulating film caused by the electrical field is negligible. The method also includes measuring a surface potential of the specimen and determining a potential of the substrate. In addition, the method includes determining a pure voltage across the insulating film from the surface potential and the substrate potential. The method further includes determining the electrical parameter from the pure voltage. The electrical parameter may be capacitance or electrical thickness of the insulating film.