The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2008
Filed:
Jul. 11, 2001
Nobuo Ishii, Hyogo, JP;
Kibatsu Shinohara, Kanagawa, JP;
Yasuyoshi Yasaka, Kyoto, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A first conductive plate (A) constituting the radiation surface of a slot antenna (A) inclines with respect to a first dielectric member () opposed to the radiation surface of the slot antenna (A). Consequently, a plasma generated by the electric field of an electromagnetic field entering directly from the slot antenna (A) can be set dominant over a plasma generated by the electric field of a standing wave formed in a processing vessel (). Since the former can be controlled more easily than the latter, the plasma distribution can be improved.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile