The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2008
Filed:
Jan. 20, 2006
James J. Cummings, Wilmington, MA (US);
Joseph Olson, Beverly, MA (US);
Arthur H. Clough, Hardwick, MA (US);
Eric Hermanson, Georgetown, MA (US);
Rosario Mollica, Wilmington, MA (US);
Paul J. Murphy, Reading, MA (US);
Mark Donahue, Malden, MA (US);
James J. Cummings, Wilmington, MA (US);
Joseph Olson, Beverly, MA (US);
Arthur H. Clough, Hardwick, MA (US);
Eric Hermanson, Georgetown, MA (US);
Rosario Mollica, Wilmington, MA (US);
Paul J. Murphy, Reading, MA (US);
Mark Donahue, Malden, MA (US);
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Abstract
An angle measurement system for an ion beam includes a flag defining first and second features, wherein the second feature has a variable spacing from the first feature, a mechanism to translate the flag along a translation path so that the flag intercepts at least a portion of the ion beam, and a sensing device to detect the ion beam for different flag positions along the translation path and produce a sensor signal in response to the detected ion beam. The sensor signal and corresponding positions of the flag are representative of a vertical beam angle of the ion beam in a vertical plane. The sensing device may include a mask and a mechanism to translate the mask in order to define a beam current sensor on a portion of an associated Faraday sensor.