The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2008
Filed:
Dec. 30, 2005
Natsuki Yokoyama, Mitaka, JP;
Yoshifumi Kawamoto, Kanagawa, JP;
Eiichi Murakami, Tokorozawa, JP;
Fumihiko Uchida, Hachioji, JP;
Kenichi Mizuishi, Hachioji, JP;
Yoshio Kawamura, Kokubunji, JP;
Natsuki Yokoyama, Mitaka, JP;
Yoshifumi Kawamoto, Kanagawa, JP;
Eiichi Murakami, Tokorozawa, JP;
Fumihiko Uchida, Hachioji, JP;
Kenichi Mizuishi, Hachioji, JP;
Yoshio Kawamura, Kokubunji, JP;
Renesas Technology Corp., Tokyo, JP;
Abstract
A fabricating method for a system that includes a plurality of processing apparatuses connected to each other by an inter-apparatus transporter and a computer storing managing information of processing and transporting of semiconductor wafers. The processing apparatuses have an interface for loading and unloading a plurality of the semiconductor wafers that are contained in a carrier. The semiconductor waters are processed in processing chambers of the processing apparatuses and the result of processing is monitored. In the processing, a first carrier containing the plurality of the semiconductor wafers having been processed in the first processing apparatus is transported toward the second processing apparatus by the inter-apparatus transporter prior to unloading of a second carrier containing semiconductor wafers processed in the second processing apparatus, according to the managing information.