The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2008
Filed:
Feb. 01, 2006
Noboru Kobayashi, Kanagawa, JP;
Riki Ogawa, Kanagawa, JP;
Masayuki Hideshima, Tokyo, JP;
Hiroyuki Nagahama, Tokyo, JP;
Koji Nakajima, Tokyo, JP;
Noboru Kobayashi, Kanagawa, JP;
Riki Ogawa, Kanagawa, JP;
Masayuki Hideshima, Tokyo, JP;
Hiroyuki Nagahama, Tokyo, JP;
Koji Nakajima, Tokyo, JP;
Advanced Mask Inspection Technology Inc., Kawasaki, JP;
Kabushiki Kaisha Topcon, Tokyo, JP;
Abstract
A device for measuring the intensity of incoming light is disclosed. This device includes a rotatable light blocking unit which interrupts incident signal light at short regular intervals. The device also includes a light source which emits certain light different from the signal light while the signal light is interrupted by the block unit, and a measurement unit for measuring intensity values of the signal light and the certain light. A correction unit is provided for correcting the measured signal light intensity based on the certain light intensity. A calculator unit calculates a correction value through comparison of the intensity of the certain light to a reference value. The correction unit uses this correction value to correct the signal light intensity.