The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2008
Filed:
Mar. 24, 2004
Applicants:
Kunihiko Iwamoto, Ibaraki, JP;
Toshihide Nabatame, Ibaraki, JP;
Koji Tominaga, Kyoto, JP;
Tetsuji Yasuda, Ibaraki, JP;
Inventors:
Kunihiko Iwamoto, Ibaraki, JP;
Toshihide Nabatame, Ibaraki, JP;
Koji Tominaga, Kyoto, JP;
Tetsuji Yasuda, Ibaraki, JP;
Assignee:
Rohm Co., Ltd., , JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A metal atomic layer and an oxygen atomic layer are formed in this order by ALD, followed by rapid heating through RTA (Rapid Thermal Annealing). This cycle of steps is repeated to form a high dielectric constant film.