The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2008
Filed:
Jan. 29, 2003
Osamu Kuroda, Tosu, JP;
Hiroki Taniyama, Tosu, JP;
Takayuki Toshima, Nirasaki, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
A substrate processing apparatus for processing a substrate With a processing fluid is provided. The apparatus includes holding membersfor holding the substrate W, a chuck memberfor supporting the holding membersand a top-face memberapproaching the substrate W to cover its surface. In arrangement, since the top-face memberis supported by the chuck member, the holding members 60 can rotate together with the top-face memberin one body. With this structure, it is possible to reduce the influence of particles on the substrate W and also possible to provided a low-cost substrate processing apparatus occupied as little installation space as possible.