The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2008
Filed:
Jun. 02, 2006
Jun Zhao, Cupertino, CA (US);
David Quach, San Jose, CA (US);
Timothy Weidman, Sunnyvale, CA (US);
Rick J. Roberts, Sunnyvale, CA (US);
Farhad Moghadam, Saratoga, CA (US);
Dan Maydan, Los Altos Hills, CA (US);
Jun Zhao, Cupertino, CA (US);
David Quach, San Jose, CA (US);
Timothy Weidman, Sunnyvale, CA (US);
Rick J. Roberts, Sunnyvale, CA (US);
Farhad Moghadam, Saratoga, CA (US);
Dan Maydan, Los Altos Hills, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An apparatus for processing substrates is disclosed. In one embodiment, the apparatus includes a housing and a plurality of stacked cell structures in the housing. An actuator is adapted to move the plurality of stacked cell structures inside of the housing while substrates in the stacked cell structures are being heated.