The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2008
Filed:
Feb. 23, 2004
Bunji Mizuno, Ikoma, JP;
Yuichiro Sasaki, Machida, JP;
Ichiro Nakayama, Kadoma, JP;
Hisataka Kanada, Katano, JP;
Bunji Mizuno, Ikoma, JP;
Yuichiro Sasaki, Machida, JP;
Ichiro Nakayama, Kadoma, JP;
Hisataka Kanada, Katano, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
A liquid phase etching method which comprises spraying a chemically reactive liquid, with a specific speed, to a solid article, an aggregate of solid articles or a gelatinous material to be treated; and a liquid etching apparatus having a mechanism for holding a processing object to be treated and a nozzle structure for spraying a chemically reactive liquid to the processing object to be treated which is held by the mechanism. The method and apparatus allow the significant improvement of the etching rate while maintaining the accuracy of etching.