The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2008
Filed:
Nov. 02, 2006
Applicants:
Hans-juergen Mann, Oberkochen, DE;
Wilhelm Ulrich, Aalen-Dewangen, DE;
Guenther Seitz, Spiegelberg, DE;
Inventors:
Hans-Juergen Mann, Oberkochen, DE;
Wilhelm Ulrich, Aalen-Dewangen, DE;
Guenther Seitz, Spiegelberg, DE;
Assignee:
Carl Zeiss SMT AG, Oberkochen, DE;
Primary Examiner:
Int. Cl.
CPC ...
G02B 17/00 (2006.01); G03B 27/72 (2006.01); G21K 5/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A projection objective provides a light path for a light bundle from an object field in an object plane to an image field in an image plane. The projection objective includes eight mirrors. The light path is provided via the eight mirrors, and is free of obscuration.