The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2008
Filed:
Feb. 07, 2003
Daisuke Toriya, Nirasaki, JP;
Kenji Homma, Nirasaki, JP;
Akihiko Tsukada, Nirasaki, JP;
Kouji Shimomura, Nirasaki, JP;
Daisuke Toriya, Nirasaki, JP;
Kenji Homma, Nirasaki, JP;
Akihiko Tsukada, Nirasaki, JP;
Kouji Shimomura, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A film processing device using vaporized liquid source capable of confirming the flow control accuracy of flow control equipment such as a mass flow controller () controlling the flow of the liquid source without separating the flow control equipment from piping and disassembling the piping, comprising a bypass passage () for bypassing a part of a washing fluid feed passage () for feeding washing fluid to a liquid source feed passage () and a flowmeter such as an MFM (), wherein the washing fluid is allowed to flow to the mass flow controller () through the MFM (), and the flow of the washing fluid detected by the MFM () is compared with a target flow set in the mass flow controller () to check whether the mass flow controller () operates normally or not.