The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7358112 B1

PDF
Full Text
Expired
Date of Patent:
Apr. 15, 2008

Filed:

Jun. 13, 2002
Applicants:

Jennifer Mary Barnes, Oxfordshire, GB;

Valerie Bousquet, Oxford, GB;

Stewart Edward Hooper, Oxfordshire, GB;

Jonathan Heffernan, Oxford, GB;

Inventors:

Jennifer Mary Barnes, Oxfordshire, GB;

Valerie Bousquet, Oxford, GB;

Stewart Edward Hooper, Oxfordshire, GB;

Jonathan Heffernan, Oxford, GB;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method of growing a p-type nitride semiconductor material having magnesium as a p-type dopant by molecular beam epitaxy (MBE), comprises supplying ammonia gas, gallium and magnesium to an MBE growth chamber containing a substrate so as to grow a p-type nitride semiconductor material over the substrate. Magnesium is supplied to the growth chamber at a beam equivalent pressure of at least 1 10-9 mbar, and preferably in the range from 1 10-9 mbar to 1 10-7 mbar during the growth process. This provides p-type GaN that has a high concentration of free charge carriers and eliminates the need to activate the magnesium dopant atoms by annealing or irradiating the material.


Find Patent Forward Citations

Barnes, Jennifer. (2008). Method of growing a semiconductor layer (U.S. Patent No. 7358112). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7358112

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