The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2008
Filed:
May. 24, 2005
Sanjay Lalbahadoersing, Helmond, NL;
Marco Johannes Annemarie Pieters, Eindhoven, NL;
Jan Hauschild, Eindhoven, NL;
Coen Van DE Vin, Weert, NL;
Sanjay Lalbahadoersing, Helmond, NL;
Marco Johannes Annemarie Pieters, Eindhoven, NL;
Jan Hauschild, Eindhoven, NL;
Coen Van De Vin, Weert, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method for measuring information provided by a substrate. The substrate includes a feature that has been created by a lithographic apparatus. The method includes projecting a beam of light onto a marker disposed above and/or near the feature on the substrate, and detecting information provided by the marker with a sensor. A coating is disposed on the substrate so that the coating lies between the beam of light and the feature to substantially prevent the beam of light from being reflected by the feature and causing an inaccurate readout of the information provided by the marker.