The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2008
Filed:
Dec. 30, 2005
Joung-wei Liou, Zhudong Town, TW;
Jacky Huang, Chu-Bei, TW;
Chih-ming KE, Hsinchu, TW;
Szu-an Wu, Hsinchu, TW;
Joung-Wei Liou, Zhudong Town, TW;
Jacky Huang, Chu-Bei, TW;
Chih-Ming Ke, Hsinchu, TW;
Szu-An Wu, Hsinchu, TW;
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Abstract
A system for measuring optical properties of a sample is provided. A light source provides incident polarized light. A detector detects reflected light from the sample surface. A processor determines a first coefficient (R) of the reflected light detected by the detector, determines a second coefficient (n), extinction coefficient (k), and thickness of the film based on the measured first coefficient, and determines a first dielectric constant (∈) and a second dielectric constant (∈) of the film according to the second coefficient (n) and extinction coefficient (k).