The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2008
Filed:
Oct. 05, 2004
Johannes Onvlee, ‘S-Hertogenbosch, NL;
Peter Ferdinand Greve, Eindhoven, NL;
Johannes Hendrikus Gertrudis Franssen, Eersel, NL;
Johannes Onvlee, ‘S-Hertogenbosch, NL;
Peter Ferdinand Greve, Eindhoven, NL;
Johannes Hendrikus Gertrudis Franssen, Eersel, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
To enable differentiation between a particle and a ghost particle, a detector system is presented. The detector system is configured to output at least two detector signals corresponding to an intensity of radiation being incident on the detector system. If radiation is received from a ghost particle, not all of the at least two detector signals has a level above a predetermined threshold level, whereas radiation received from a contaminating particle results in all signals having a level above a threshold level. Thus, it may be determined with a high accuracy whether a particle or a ghost particle is redirecting radiation towards the detector system.