The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2008
Filed:
Mar. 21, 2003
Koji Egashira, Tosu, JP;
Yuji Kamikawa, Tosu, JP;
Masaki Taira, Tosu, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
The present invention provides a rotary shaft sealing mechanism having the seal between the rotary shaft and the seal ring improved, and a liquid processing apparatus including the rotary shaft sealing mechanism. The cleaning processing apparatuscomprises a rotorfor holding wafers W, an outer chamberand an inner chamberwhich can house the rotora spindlefor rotating the rotorand an outer cylindrical memberdisposed around the spindleA first sealing ringetc. of resins are provided in a ring memberconstituting the outer cylindrical memberA clearance between the spindleand the first sealing ringis adjusted by press inserting the spindleinto the first sealing ringetc. and rotating the spindlefor a prescribed period of time to abrade the fist sealing ringetc.