The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2008
Filed:
Nov. 05, 2004
John Burns, Colorado Springs, CO (US);
Matthew A. Fuller, Colorado Springs, CO (US);
Jeffery J. King, Colorado Springs, CO (US);
Martin L. Forbes, Divide, CO (US);
Mark V. Smith, Colorado Springs, CO (US);
John Burns, Colorado Springs, CO (US);
Matthew A. Fuller, Colorado Springs, CO (US);
Jeffery J. King, Colorado Springs, CO (US);
Martin L. Forbes, Divide, CO (US);
Mark V. Smith, Colorado Springs, CO (US);
Entegris, Inc., Chaska, MN (US);
Abstract
A wafer carrier door having an inner door portion and an outer door portion. The inner door portion has a substantially continuous inner surface. The outer door portion extends over at least a portion of the inner door portion. The outer door portion has a plurality of apertures formed therein. The outer door portion is attached to the inner door portion.