The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2008
Filed:
Feb. 22, 2005
Ronald Walther Jeanne Severijns, Veldhoven, NL;
Marcel Johannus Elisabeth Hubertus Muitjens, Nuth, NL;
Sonia Margart Skelly, Veldhoven, NL;
Theodorus Petrus Maria Cadee, Vlierden, NL;
Ronald Walther Jeanne Severijns, Veldhoven, NL;
Marcel Johannus Elisabeth Hubertus Muitjens, Nuth, NL;
Sonia Margart Skelly, Veldhoven, NL;
Theodorus Petrus Maria Cadee, Vlierden, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic apparatus comprising: an illumination system for providing a projection beam of radiation; a gas pressure controlled article clamp for clamping an article to be placed in a beam path of the projection beam of radiation; and a pressure circuit for controlling the article clamp, comprising a supply line for connection with the article clamp. According to the invention, a buffer volume is provided for providing a buffered gas pressure pulse in the supply line. In this way, faster clamp response times can be realized.