The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 11, 2008

Filed:

Dec. 21, 2004
Applicants:

Akira Yamauchi, Shiga, JP;

Yoshiyuki Arai, Shiga, JP;

Inventors:

Akira Yamauchi, Shiga, JP;

Yoshiyuki Arai, Shiga, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method of accurately calibrating a movement control system of mark recognition means in a chip mounting device, comprising the steps of: recognizing a first recognition mark put on a head () and a second recognition mark () put on a stage () with two-field recognition means () so as to calibrate and update the preceding control parameters inputted into the movement control system of the two-field recognition means (); and, with the head () lowered to position the first recognition mark closely to the second recognition mark (), recognizing both marks with third recognition means () when the two-field recognition means () is moved back so as to calibrate and update the preceding control parameters inputted into the movement control system of the two-field recognition means ().


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