The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2008
Filed:
Sep. 10, 2004
Hiroyuki Fukuyama, Yokohama, JP;
Wataru Nakao, Kawasaki, JP;
Shinya Kusunoki, Kawasaki, JP;
Kazuya Takada, Shunan, JP;
Akira Hakomori, Shunan, JP;
Hiroyuki Fukuyama, Yokohama, JP;
Wataru Nakao, Kawasaki, JP;
Shinya Kusunoki, Kawasaki, JP;
Kazuya Takada, Shunan, JP;
Akira Hakomori, Shunan, JP;
Tokuyama Corporation, Tojuyama-shi, JP;
The Circle for the Promotion of Science and Engineering, Tokyo, JP;
Abstract
A highly crystalline aluminum nitride multi-layered substrate comprising a single-crystal α-alumina substrate, an aluminum oxynitride layer and a highly crystalline aluminum nitride film as the outermost layer which are formed in the mentioned order, wherein the aluminum oxynitride layer has a threading dislocation density of 6.3×10/cmor less and a crystal orientation expressed by the half-value width of its rocking curve of 4,320 arcsec or less; and a production process thereof.