The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2008
Filed:
Sep. 20, 2005
Yoshiharu Shirakawabe, Chiba, JP;
Hiroshi Takahashi, Chiba, JP;
Tadashi Arai, Chiba, JP;
SII NanoTechnology Inc., , JP;
Abstract
In order to establish processing techniques capable of making multi-tip probes with sub-micron intervals and provide such microscopic multi-tip probes, there is provided an outermost surface analysis apparatus for semiconductor devices etc. provided with a function for enabling positioning to be performed in such a manner that there is no influence on measurement in electrical measurements at an extremely small region using this microscopic multi-tip probe, and there are provided the steps of making a cantileverformed with a plurality of electrodesusing lithographic techniques, and forming microscopic electrodesminute in pitch by sputtering or gas-assisted etching a distal end of the cantileverusing a focused charged particle beam or using CVD.