The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2008
Filed:
Mar. 20, 2003
Kazuhiko Shimanuki, Yamagata, JP;
Hiroyuki Honma, Yamagata, JP;
Norihiko Saito, Yamagata, JP;
Hideyuki Yokoyama, Yamagata, JP;
Takanori Saito, Machida, JP;
Ken Nakao, Sagamihara, JP;
Kazuhiko Shimanuki, Yamagata, JP;
Hiroyuki Honma, Yamagata, JP;
Norihiko Saito, Yamagata, JP;
Hideyuki Yokoyama, Yamagata, JP;
Takanori Saito, Machida, JP;
Ken Nakao, Sagamihara, JP;
Covalent Materials Corporation, Tokyo, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
It is provided that a reflection plate of semiconductor heat treatment, which is resistant to cracks or deformations by controlling the adsorption of foreign materials and the production of reaction. Said reflection platefor semiconductor heat treatment is composed of a disk-shaped or ring-shaped plate of optically transmissible material and a plateof inorganic material hermetically enclosed in said disk-shaped or ring-shaped plate, in which said plate of inorganic material has at least one side in contact with said plate of optically transmissible material, said at least one sidehaving a surface roughness of Ra 0.1 to 10.0 μm, said at least one sideformed groovestherein.