The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 19, 2008

Filed:

Jul. 10, 2006
Applicants:

Jim Lin, Taoyuan County, TW;

San-jung Chang, Hsinchu, TW;

Yu-cheng Lo, Changhua County, TW;

Inventors:

Jim Lin, Taoyuan County, TW;

San-Jung Chang, Hsinchu, TW;

Yu-Cheng Lo, Changhua County, TW;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/8242 (2006.01); H01L 21/336 (2006.01);
U.S. Cl.
CPC ...
Abstract

A semiconductor device with a recessed channel and a method of fabricating the same are provided. The semiconductor device comprises a substrate, a gate, a source, a drain, and a reverse spacer. The substrate comprises a recessed trench. The gate is formed above the recessed trench and extends above the substrate. The gate further comprises a polysilicon layer and a conductive layer; wherein the polysilicon layer is formed inside the recessed trench of the substrate, and the conductive layer is formed above the polysilicon layer and extends above the substrate. Moreover, the width of the conductive layer increases gradually bottom-up. The source and the drain are formed respectively at two sides of the gate. The reverse spacer is formed above the polysilicon layer and against the sidewall of the conductive layer.


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