The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2008
Filed:
May. 10, 2004
Shinji Kobayashi, Kikuyo-Machi, JP;
Norihisa Koga, Kikuyo-Machi, JP;
Shinji Kobayashi, Kikuyo-Machi, JP;
Norihisa Koga, Kikuyo-Machi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A thin film removing device and a thin film removing method are capable of removing straight parts of a thin film formed on a square substrate from corners of the substrate, and of suppressing the formation of mists. An approach stagehaving flat stage platescapable of being disposed substantially flush with the surface of a substrate M mounted on a support tableis positioned close to the substrate M mounted on the support table. Removing nozzlesjet a solvent toward edge parts of the substrate M and suck a solution produced by dissolving part of the resist in the solvent while the removing nozzlesare moved along side edges of the substrate M and the approach stagedisposed close to the substrate M. Thus, the removing nozzlesjet the solvent uniformly over the edge parts and corners of the substrate M and suck the solution without changing modes of jetting the solvent and sucking the solution. Consequently, straight parts of a thin film formed on the square substrate M can be removed from the corners of the substrate M, and the formation of mists can be suppressed.