The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2008
Filed:
Feb. 24, 2004
Makoto Muramatsu, Nirasaki, JP;
Hitoshi Hashima, Kikuchi-gun, JP;
Norihiko Sasagawa, Kikuchi-gun, JP;
Takeshi Hirao, Kikuchi-gun, JP;
Makoto Muramatsu, Nirasaki, JP;
Hitoshi Hashima, Kikuchi-gun, JP;
Norihiko Sasagawa, Kikuchi-gun, JP;
Takeshi Hirao, Kikuchi-gun, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A process liquid supply nozzle comprises a substantially tubular main nozzle provided with a discharge port for discharging a coating liquid, a substantially bowl-shaped nozzle holder provided with a through-hole into which the main nozzle can be inserted, and a free space formed between the inner circumferential surface of the nozzle holder and the outer circumferential surface of the main nozzle, at least a prescribed cleaning liquid being supplied into the free space. The nozzle holder or the nozzle is relatively movable in the vertical direction such that the coating liquid is discharged from the discharge port under the state that the discharge port of the main nozzle projects downward from the through-hole, and the nozzle is cleaned with the cleaning liquid under the state that the nozzle is housed in the nozzle holder.