The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2008
Filed:
Jul. 01, 2005
Chris L. Koliopoulos, Tucson, AZ (US);
Jaydeep K. Sinha, Mansfield, MA (US);
Delvin A. Lindley, Tucson, AZ (US);
John F. Valley, Tucson, AZ (US);
Noel Poduje, Needham Heights, MA (US);
Chris L. Koliopoulos, Tucson, AZ (US);
Jaydeep K. Sinha, Mansfield, MA (US);
Delvin A. Lindley, Tucson, AZ (US);
John F. Valley, Tucson, AZ (US);
Noel Poduje, Needham Heights, MA (US);
KLA-Tencor Technologies Corporation, Milpitas, CA (US);
Abstract
A method and software is disclosed for evaluating characteristics, such as flatness, of a surface of a sample having an edge, comprising selecting an evaluation area having an area surface and a boundary, at least one portion of which is definable with reference to the edge, and evaluating characteristics of the area surface. Edge-specific evaluation conditions are used with edge-specific metrics to quantify parameters for said evaluation area. A system for evaluating such characteristics comprises a data collection system for generating data values for selected locations on said surface; and a data analyzing system for analyzing data values to determine such characteristics. A data interpolation system may be provided to interpolate data values collected with reference to a first coordinate system for analyzing with reference to a second coordinate system.