The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 29, 2008

Filed:

Jun. 14, 2005
Applicants:

Mark G. Stinson, East Alton, IL (US);

Henry F. Erk, St. Louis, MO (US);

Guoqiang (David) Zhang, Ballwin, MO (US);

Mick Bjelopavlic, O'Fallon, MO (US);

Alexis Grabbe, St. Charles, MO (US);

Jozef G. Vermeire, St. Charles, MO (US);

Judith A. Schmidt, St. Peters, MO (US);

Thomas E. Doane, Troy, MO (US);

James R. Capstick, Florissant, MO (US);

Inventors:

Mark G. Stinson, East Alton, IL (US);

Henry F. Erk, St. Louis, MO (US);

Guoqiang (David) Zhang, Ballwin, MO (US);

Mick Bjelopavlic, O'Fallon, MO (US);

Alexis Grabbe, St. Charles, MO (US);

Jozef G. Vermeire, St. Charles, MO (US);

Judith A. Schmidt, St. Peters, MO (US);

Thomas E. Doane, Troy, MO (US);

James R. Capstick, Florissant, MO (US);

Assignee:

MEMC Electronic Materials, Inc., St. Peters, MO (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/461 (2006.01);
U.S. Cl.
CPC ...
Abstract

A process for etching silicon wafers using a caustic etchant in the form of an aqueous solution comprising water, a hydroxide ion source, and a chelating agent. The process produces silicon wafers substantially free from diffused metal ions.


Find Patent Forward Citations

Stinson, Mark. (2008). Silicon wafer etching process and composition (U.S. Patent No. 7323421). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7323421

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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