The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 29, 2008

Filed:

Jul. 14, 2005
Applicants:

Masaru Kadoshima, Tsukuba, JP;

Toshihide Nabatame, Tsukuba, JP;

Inventors:

Masaru Kadoshima, Tsukuba, JP;

Toshihide Nabatame, Tsukuba, JP;

Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/8238 (2006.01);
U.S. Cl.
CPC ...
Abstract

A structure of a MIS transistor for realizing a CMOS circuit capable of simultaneously achieving the high ON current and the low power consumption is provided. Each of the gate insulators of an n channel MIS transistor and a p channel MIS transistor is composed of a hafnium oxide (HfO) film. Also, the gate electrode of the n channel MIS transistor is composed of an Ni (nickel) silicide film, and the gate electrode of the p channel MIS transistor is composed of a Pt (platinum) film. In this structure, Fermi level pinning of the gate electrodes can be prevented. Therefore, the increase of the threshold voltage of the n channel MIS transistor and the p channel MIS transistor can be inhibited.


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