The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 15, 2008
Filed:
Mar. 28, 2005
Applicants:
Daisuke Kawana, Kawasaki, JP;
Tomotaka Yamada, Kawasaki, JP;
Hiroshi Shimbori, Kawasaki, JP;
Koki Tamura, Kawasaki, JP;
Tomoyuki Ando, Kawasaki, JP;
Takayuki Hosono, Kawasaki, JP;
Inventors:
Daisuke Kawana, Kawasaki, JP;
Tomotaka Yamada, Kawasaki, JP;
Hiroshi Shimbori, Kawasaki, JP;
Koki Tamura, Kawasaki, JP;
Tomoyuki Ando, Kawasaki, JP;
Takayuki Hosono, Kawasaki, JP;
Assignee:
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/039 (2006.01);
U.S. Cl.
CPC ...
Abstract
A lift-off positive resist composition capable of forming a fine lift-off pattern is provided. This composition comprises a base resin component (A) and an acid generator component (B) generating an acid under exposure, wherein the base resin component (A) is a silicone resin.