The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 08, 2008
Filed:
Apr. 28, 2005
Igor Petrov, Holon, IL;
Igor Krivts (Krayvitz), Rehovot, IL;
Eitan Kidron, Hod Hasharon, IL;
Guy Eitan, Kfar HaOranim, IL;
Igal Ben-dayan, D.N. Negev, IL;
Igor Petrov, Holon, IL;
Igor Krivts (Krayvitz), Rehovot, IL;
Eitan Kidron, Hod Hasharon, IL;
Guy Eitan, Kfar HaOranim, IL;
Igal Ben-Dayan, D.N. Negev, IL;
Applied Materials, Israel, Ltd., Rehovot, IL;
Abstract
Wafer supporting apparatus, including an electrostatic chuck for supporting the wafer. The apparatus further includes an electrostatic shield which is positioned in proximity to the chuck and the wafer, and a voltage source which is coupled to apply an electric field between the chuck and the wafer. The voltage source applies one or more potentials to the electrostatic shield so as to prevent penetration of particles to the wafer.