The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 08, 2008
Filed:
May. 14, 2002
Keiji Horioka, Chiba, JP;
Chun Yan, San Jose, CA (US);
Taeho Shin, San Jose, CA (US);
Roger Alan Lindley, Santa Clara, CA (US);
Qi LI, San Jose, CA (US);
Panyin Hughes, Gaithersburg, MD (US);
Douglas H. Burns, Saratoga, CA (US);
Evans Y. Lee, Milpitas, CA (US);
Bryan Y. Pu, San Jose, CA (US);
Keiji Horioka, Chiba, JP;
Chun Yan, San Jose, CA (US);
Taeho Shin, San Jose, CA (US);
Roger Alan Lindley, Santa Clara, CA (US);
Qi Li, San Jose, CA (US);
Panyin Hughes, Gaithersburg, MD (US);
Douglas H. Burns, Saratoga, CA (US);
Evans Y. Lee, Milpitas, CA (US);
Bryan Y. Pu, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A magnetic field generator for producing a magnetic field that accelerates plasma formation is placed proximate a reaction chamber of semiconductor substrate processing system. The magnetic field generator has four main magnetic coil sections for producing a magnetic field nearly parallel to the top surface of a support pedestal in the reaction chamber and four sub-magnetic coil sections placed generally coaxially with the main magnetic coil sections to produce a magnetic field of the direction opposite of that of the magnetic field produced with the main magnetic coil sections. In the magnetic field generator, magnetic fields of opposite polarities are superimposed on each other when electric currents of opposite directions are applied to the main and sub-magnetic coil sections.