The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2008
Filed:
Sep. 30, 2003
Craig T. Baldwin, Phoenix, AZ (US);
Carl M. Spearow, Gilbert, AZ (US);
Mirko Vukovic, Gilbert, AZ (US);
Craig T. Baldwin, Phoenix, AZ (US);
Carl M. Spearow, Gilbert, AZ (US);
Mirko Vukovic, Gilbert, AZ (US);
Tokyo Electron Limited, Tokyo, JP;
Abstract
The present invention presents an improved apparatus and method for monitoring a material processing system, where the material processing system includes a processing tool, test signal source, and a filter/detector. The test signal source providing a first test signal and a second test signal to the processing chamber, and the filter/detector detecting an intermodulation product of the first test signal and the second test signal generated when a plasma is created.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile