The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 18, 2007
Filed:
Dec. 30, 2005
Natsuki Yokoyama, Mitaka, JP;
Yoshifumi Kawamoto, Kanagawa, JP;
Eiichi Murakami, Tokorozawa, JP;
Fumihiko Uchida, Hachioji, JP;
Kenichi Mizuishi, Hachioji, JP;
Yoshio Kawamura, Kokubunji, JP;
Natsuki Yokoyama, Mitaka, JP;
Yoshifumi Kawamoto, Kanagawa, JP;
Eiichi Murakami, Tokorozawa, JP;
Fumihiko Uchida, Hachioji, JP;
Kenichi Mizuishi, Hachioji, JP;
Yoshio Kawamura, Kokubunji, JP;
Renesas Technology Corp., Tokyo, JP;
Abstract
A fabricating method for a system including a plurality of processing apparatuses connected to each other by an inter-apparatus transporter. The semiconductor waters are processed in the processing apparatuses and are transported to specified processing apparatuses in different time interval that are set to N times a unit time interval. Since the fabricating system includes processing apparatuses and an inter-apparatus transporter that are periodically controlled at time intervals related to a unit time, intervals related to a unit time, the scheduling of a plurality of works can be made efficiently to enhance the level of optimization, thus improving the productivity.