The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 18, 2007
Filed:
Mar. 17, 2006
Harmen Klaas Van Der Schoot, Vught, NL;
Erik Roelof Loopstra, Heeze, NL;
Fransicus Mathijs Jacobs, Asten, NL;
Godfried Katharina Hubertus Franciscus Geelen, Echt, NL;
Harmen Klaas Van Der Schoot, Vught, NL;
Erik Roelof Loopstra, Heeze, NL;
Fransicus Mathijs Jacobs, Asten, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A moveable member is provided which extends the top surface of a substrate table, in plan, beyond a bumper which protects the substrate table during collision. The moveable member may be retracted to a retracted position in which it no longer extends beyond the bumper. In this way it is possible to move two substrate tables together and to allow the retractable member to pass under a liquid supply system which normally provides liquid between the projection system and a substrate without turning off of the liquid supply system.