The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2007
Filed:
Jun. 11, 2002
Satayadev R. Patel, Sunnyvale, CA (US);
Andrew G. Huibers, Palo Alto, CA (US);
Steve Chiang, Saratoga, CA (US);
Robert M. Duboc, Menlo Park, CA (US);
Thomas J. Grobelny, Snohomish, WA (US);
Hung Nan Chen, Kaohsiung, TW;
Dietrich Dehlinger, Sebastopol, CA (US);
Peter W. Richards, Palo Alto, CA (US);
Hongqin Shi, San Jose, CA (US);
Anthony Sun, San Jose, CA (US);
Satayadev R. Patel, Sunnyvale, CA (US);
Andrew G. Huibers, Palo Alto, CA (US);
Steve Chiang, Saratoga, CA (US);
Robert M. Duboc, Menlo Park, CA (US);
Thomas J. Grobelny, Snohomish, WA (US);
Hung Nan Chen, Kaohsiung, TW;
Dietrich Dehlinger, Sebastopol, CA (US);
Peter W. Richards, Palo Alto, CA (US);
Hongqin Shi, San Jose, CA (US);
Anthony Sun, San Jose, CA (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A projection system, a spatial light modulator, and a method for forming a MEMS device is disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micromirror array. The two substrates can be bonded at the wafer level after depositing a getter material andlor solid or liquid lubricant on one or both of the wafers. The wafers can be bonded together hermetically if desired, and the pressure between the two substrates can be below atmosphere.