The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2007
Filed:
Oct. 27, 2004
Kazunari Sekigawa, Nagano, JP;
Toshinori Koyama, Nagano, JP;
Kazutaka Kobayashi, Nagano, JP;
Masatoshi Akagawa, Nagano, JP;
Kazunari Sekigawa, Nagano, JP;
Toshinori Koyama, Nagano, JP;
Kazutaka Kobayashi, Nagano, JP;
Masatoshi Akagawa, Nagano, JP;
Shinko Electric Industries Co., Ltd., Nagano, JP;
Abstract
A direct exposure system comprises: a data mask that is a data object including drawing data; and a control mask that is a data object including at least one logical layer in which information about exposure conditions applied according to regions on a substrate is specified, and performs a direct exposure process using integrated data generated by combining the data mask with the control mask.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile